Langmuir probe and optical emission spectroscopy studies for RF magnetron sputtering during TiON thin film deposition
Publication date:
2020
Publisher version:
Citación:
Chinese Journal of Physics, 68, p. 168-177 (2020); doi:10.1016/j.cjph.2020.09.012
Descripción física:
p. 168-177
ISSN:
Collections
- Artículos [34656]