| dc.contributor.author | Metawa, A. E. | |
| dc.contributor.author | El-Hossary, F. M. | |
| dc.contributor.author | Raaif, M. | |
| dc.contributor.author | Salaheldeen, Mohamed Hassan | |
| dc.contributor.author | El-Moula, A. A. A. | |
| dc.date.accessioned | 2021-06-01T09:42:31Z | |
| dc.date.available | 2021-06-01T09:42:31Z | |
| dc.date.issued | 2020 | |
| dc.identifier.citation | Chinese Journal of Physics, 68, p. 168-177 (2020); doi:10.1016/j.cjph.2020.09.012 | |
| dc.identifier.issn | 0577-9073 | |
| dc.identifier.uri | http://hdl.handle.net/10651/58771 | |
| dc.format.extent | p. 168-177 | |
| dc.language.iso | eng | |
| dc.relation.ispartof | Chinese Journal of Physics | |
| dc.rights | © 2020 The Physical Society of the Republic of China (Taiwan). Published by Elsevier B.V | |
| dc.source | Scopus | |
| dc.source.uri | https://www.scopus.com/inward/record.uri?eid=2-s2.0-85091255791&doi=10.1016%2fj.cjph.2020.09.012&partnerID=40&md5=1b75e123b502a03fb112360a21ec1651 | |
| dc.title | Langmuir probe and optical emission spectroscopy studies for RF magnetron sputtering during TiON thin film deposition | |
| dc.type | info:eu-repo/semantics/article | |
| dc.identifier.doi | 10.1016/j.cjph.2020.09.012 | |
| dc.type.dcmi | text | |
| dc.relation.publisherversion | http://dx.doi.org/10.1016/j.cjph.2020.09.012 | |
