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Common-path two-wavelength interferometer with submicron precision for profile measurements in on-line applications

dc.contributor.authorEnguita González, José María 
dc.contributor.authorÁlvarez García, Ignacio 
dc.contributor.authorFrade Rodríguez, María 
dc.contributor.authorMarina Juárez, Jorge 
dc.date.accessioned2013-01-30T09:55:46Z
dc.date.available2013-01-30T09:55:46Z
dc.date.issued2010
dc.identifier.citationOptical Engineering, 49(2), (2010); doi:10.1117/1.3321709spa
dc.identifier.issn1094-4087
dc.identifier.urihttp://hdl.handle.net/10651/5822
dc.language.isoeng
dc.relation.ispartofOptical Engineeringspa
dc.sourceWOKspa
dc.titleCommon-path two-wavelength interferometer with submicron precision for profile measurements in on-line applicationsspa
dc.typejournal article
dc.identifier.local20100489spa
dc.identifier.doi10.1117/1.3321709
dc.relation.publisherversionhttp://dx.doi.org/10.1117/1.3321709spa


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