Two-step resist deposition of e-beam patterned thick Py nanostructures for X-ray microscopy
Publication date:
2022
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Citación:
Micromachines, 13(2) (2022); doi:10.3390/mi13020204
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This research was funded by the Spanish MCI under Project No. PID2019-104604RB/AEI/10.13039/501100011033 and by the Asturias FICYT under grant GRUPIN21 AYUD/2021/51185.
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