Common-path two-wavelength interferometer with submicron precision for profile measurements in on-line applications

dc.contributor.author	Enguita González, José María
dc.contributor.author	Álvarez García, Ignacio
dc.contributor.author	Frade Rodríguez, María
dc.contributor.author	Marina Juárez, Jorge
dc.date.accessioned	2013-01-30T09:55:46Z
dc.date.available	2013-01-30T09:55:46Z
dc.date.issued	2010
dc.identifier.citation	Optical Engineering, 49(2), (2010); doi:10.1117/1.3321709	spa
dc.identifier.issn	1094-4087
dc.identifier.uri	http://hdl.handle.net/10651/5822
dc.language.iso	eng
dc.relation.ispartof	Optical Engineering	spa
dc.source	WOK	spa
dc.title	Common-path two-wavelength interferometer with submicron precision for profile measurements in on-line applications	spa
dc.type	journal article
dc.identifier.local	20100489	spa
dc.identifier.doi	10.1117/1.3321709
dc.relation.publisherversion	http://dx.doi.org/10.1117/1.3321709	spa

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