Spatial characterization of pressure-based plasma regimes in a radiofrequency glow discharge by using optical emission spectroscopy
Publication date:
2011
Publisher version:
Citación:
Journal of Analytical Atomic Spectrometry, 26(4), p. 758-765 (2011); doi:10.1039/c0ja00177e
Descripción física:
p. 758-765
Identificador local:
20110255