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Radiofrequency glow discharge time of flight mass spectrometry for thin films analysis: Pulsed mode versus continuous mode

Author:
Bordel García, NereaUniovi authority; Lobo Revilla, LaraUniovi authority; Pisonero Castro, JorgeUniovi authority; Pereiro García, María RosarioUniovi authority; Tuccitto, Nunzio; Licciardello, Antonino; Tempez, Agnès; Chapon, Patrick; Hohl, Markus; Michler, Johann; Sanz Medel, AlfredoUniovi authority
Subject:

Continuous Mode; Pulse Mode; Radiofrequency Glow Discharge; Thin Film; Time of Flight Mass Spectrometry

Publication date:
2009
Citación:
Yejin Fenxi/Metallurgical Analysis, 29(11), p. 1-7 (2009)
Descripción física:
p. 1-7
Abstract:

Direct surface and depth profiling chemical analysis of advanced multilayer materials demands "multi-dimensional" knowledge, including simultaneous elemental and molecular information. Pulsed radiofrequency glow discharges (pulsed rf-GDs) with detection by time of flight mass spectrometry (TOFMS) provide direct chemical information from a great variety of materials in a fast and easy way. On the other hand, the temporal distribution of the applied power in pulsed rf-GDs produces three main regimes in the discharge (prepeak, plateau and afterpeak) with different mechanisms of ionization. As a result, the quasi-simultaneous acquisition of elemental and molecular ions (at the different pulse regimes) becomes a real possibility when coupling the GD ion source to a fast TOF mass spectrometer.

Direct surface and depth profiling chemical analysis of advanced multilayer materials demands "multi-dimensional" knowledge, including simultaneous elemental and molecular information. Pulsed radiofrequency glow discharges (pulsed rf-GDs) with detection by time of flight mass spectrometry (TOFMS) provide direct chemical information from a great variety of materials in a fast and easy way. On the other hand, the temporal distribution of the applied power in pulsed rf-GDs produces three main regimes in the discharge (prepeak, plateau and afterpeak) with different mechanisms of ionization. As a result, the quasi-simultaneous acquisition of elemental and molecular ions (at the different pulse regimes) becomes a real possibility when coupling the GD ion source to a fast TOF mass spectrometer.

URI:
http://hdl.handle.net/10651/7807
ISSN:
1000-7571
Identificador local:

20090186

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