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Optical characterization of ALD-coated nanoporous alumina structures: effect of sample geometry or coated layer material
dc.contributor.author | Cuevas, A. L. | |
dc.contributor.author | Vega V. | |
dc.contributor.author | Domínguez, A. | |
dc.contributor.author | González García, Ana Silvia | |
dc.contributor.author | Prida Pidal, Víctor Manuel de la | |
dc.contributor.author | Benavente, J. | |
dc.date.accessioned | 2023-08-28T09:42:04Z | |
dc.date.available | 2023-08-28T09:42:04Z | |
dc.date.issued | 2023 | |
dc.identifier.citation | Micromachines, 14(4) (2023); doi:10.3390/mi14040839 | |
dc.identifier.issn | 2072-666X | |
dc.identifier.uri | https://hdl.handle.net/10651/69433 | |
dc.description.sponsorship | This research was funded by the Spanish MCI under grant number PID2019-108075RB-C32/AEI/10.13039/501100011033. | |
dc.language.iso | eng | |
dc.relation.ispartof | Micromachines | |
dc.rights | © 2023 Los autores | |
dc.rights | CC Reconocimiento 4.0 Internacional | |
dc.rights.uri | http://creativecommons.org/licenses/by/4.0/ | |
dc.source | Scopus | |
dc.source.uri | https://www.scopus.com/inward/record.uri?eid=2-s2.0-85156154295&doi=10.3390%2fmi14040839&partnerID=40&md5=dea8ee5c39cced68c932335996848e01 | |
dc.title | Optical characterization of ALD-coated nanoporous alumina structures: effect of sample geometry or coated layer material | |
dc.type | journal article | |
dc.identifier.doi | 10.3390/mi14040839 | |
dc.relation.projectID | MCI/PID2019-108075RB-C32 | |
dc.relation.publisherversion | http://dx.doi.org/10.3390/mi14040839 | |
dc.rights.accessRights | open access | |
dc.type.hasVersion | VoR |
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