Pulsed radiofrequency glow discharge time-of-flight mass spectrometry: Depth profile analysis of multilayers on conductive and non-conductive substrates

dc.contributor.author	Lobo Revilla, Lara
dc.contributor.author	Fernández García, Beatriz
dc.contributor.author	Aranaz Fernández, Marta
dc.contributor.author	Fernández Lorenzo, Andrés
dc.contributor.author	Martín Carbajo, José Ignacio
dc.contributor.author	Pereiro García, María Rosario
dc.date.accessioned	2020-09-24T07:44:11Z
dc.date.available	2020-09-24T07:44:11Z
dc.date.issued	2020
dc.identifier.citation	Spectrochimica Acta - Part B Atomic Spectroscopy, 168, p. 105865- (2020); doi:10.1016/j.sab.2020.105865
dc.identifier.issn	0584-8547
dc.identifier.uri	http://hdl.handle.net/10651/56675
dc.description.sponsorship	Work supported by Spanish MINECO under grant FIS2016-76058 (AEI/FEDER, EU).
dc.format.extent	p. 105865-
dc.language.iso	eng
dc.relation.ispartof	Spectrochimica Acta - Part B Atomic Spectroscopy
dc.rights	© 2020 Elsevier
dc.source	Scopus
dc.source.uri	https://www.scopus.com/inward/record.uri?eid=2-s2.0-85084378798&doi=10.1016%2fj.sab.2020.105865&partnerID=40&md5=f3307273316de04184cacb3960283cbe
dc.title	Pulsed radiofrequency glow discharge time-of-flight mass spectrometry: Depth profile analysis of multilayers on conductive and non-conductive substrates
dc.type	journal article
dc.identifier.doi	10.1016/j.sab.2020.105865
dc.relation.projectID	MINECO/FIS2016-76058
dc.relation.publisherversion	http://dx.doi.org/10.1016/j.sab.2020.105865

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