TítuloJournal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
ISSN(p)0734-2101
JCRSJR
20091.2970.754
20101.2910.732
20111.2530.592
20121.4320.528
20132.140.382
20142.3220.315
20151.7240.339
20154.731.435
20162.5911.414
20161.3740.417
20171.761-
20173.78-
20184.5470.553
20181.833-
20192.1660.588
20202.4270.583
20213.2340.676
20222.90.55