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Browsing by Author Bensaoula, Abdelhak

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2010Quantitative depth profile analysis of boron implanted silicon by pulsed radiofrequency glow discharge time-of-flight mass spectrometryPisonero Castro, Jorge; Lobo Revilla, Lara; Bordel García, Nerea; Tempez, Agnès; Bensaoula, Abdelhak; Badi, Nacer; Sanz Medel, Alfredo
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